Tel Number
180-3717-8440
Company Statement" Zhengzhou KJ Technology Co., Ltd. " belongs to the international business department of KJ Group. Starting today, the company will continue the international business contract signed or currently being performed by " Zhengzhou Kejia Furnace Co., Ltd. " See details >>



Description:
The CVD system mainly consists of: 1200-degree dual-temperature zone slide tube furnace, high vacuum molecular pump vacuum system, 6-way mass flow meter gas supply system and other connectors;
| Product name | Dual temperature zone slide type CVD System |
| 1200 double temperature zone slide tube furnace | |
| Chamber type | open-type |
| Furnace sliding | The material can be quickly cooled and heated by sliding left and right on the guide rail. |
| Chamber material | Alumina refractory fiber |
| Heating element | Molybdenum heating wire |
| Max.temperature | 1200℃ |
| Working temperature | ≤1100℃ |
| Heating rate | ≤20℃(Suggest:15℃/min) |
| Heating zone | Double zone |
| Total length of temperature zone | 200+200mm |
| Furnace tube material | High purity quartz |
| Furnace tube diameter | 60mm |
| Sealing method | A set of stainless steel vacuum flanges (including sealing silicone rings). One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets. |
| control mode | Multi-stage intelligent PID program temperature control |
| Temperature measuring element | N type thermocouple |
| Call the police | With overtemperature and disconnection alarm |
| Air supply system KJ-6Z | |
| Operating temperature | 5--45℃ |
| Maximum air pressure | 3*106Pa |
| gas channel | Can connect to 6 gas sources at the same time The mass flow meter and gas mixing tank are installed in the mobile box |
| flow meter | Mass flow meter (other ranges are optional and do not affect the price) |
| A channel range | 0~300SCCM |
| B channel range | 0~300SCCM |
| C channel range | 0~300SCCM |
| D channel range | 0~300SCCM |
| E channel range | 0~300SCCM |
| F channel range | 0~300SCCM |
| Air line pressure | -0.1~0.15 MPa |
| Shut-off valve | Stainless steel material |
| Gas connection pipe | stainless steel pipe |
| Vacuum system (including stainless steel bellows and related connection accessories) | |
| Vacuum pump + digital vacuum gauge | Molecular pump unit and corresponding connecting pipe fittings. Pulleys are installed at the bottom for easy movement, and a high-temperature furnace can be placed above it. The ultimate vacuum degree can achieve 6.67*10-3pa. |


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Professional Process, Effortless Purchase
Click to inquire
E-mail:web@kejiafurnace.com
Tell:+(86) 18037178440
Whatapp:+(86) 180-3717-8440
Address:Room 1505, Building 9, No. 26 Dongqing Street, Zhengzhou High-tech Industrial Development Zone
Tel Number
180-3717-8440
web@kejiafurnace.com
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